Refined Process & Product Quality
IonTamer™ FA measures continuously and delivers calibrated mass spectra of the full mass range up to 10 times per second with a mass resolution up to 1800 at full width and half maximum. Through in-situ, real-time quantitative analysis with high sensitivity a world of new process measurements and control possibilities opens to you.
Materials for Harsh Environement
High-Performance TOF‑MS Analyzer
Innovative Dynode Detector
Compact Electronics Box
Long-Life Ion Source
- Wafer manufacturing: process optimization for higher reliability and yield.
- ALD process control for higher product quality in display manufacturing.
- Environmental research where robust and mobile instruments are required.
- Industrial vacuum coating.
Software & Data Acquisition
- Full remote configuration, control, and monitoring of the instrument.
- Automated operation for ease of use.
- Continuous data stream of full mass spectra with 100 ms integration time each, without dead time.
- Live mass spectra visualization and processing as time series.