• The IonTamer™ instruments can measure the composition of gases used for semiconductor manufacturing, with their high speed (a full high-resolution spectrum every 0.1 s) and high sensitivity. Thanks to these properties and their small form factor, they can be used for process control to increase yield and reliability.

    Customized integrations with existing control systems are available. Additionally, our instruments are available in a version built for harsh environments (i.e. corrosive gases).

  • Based on the time-of-flight principle, the ­IonTamer™ instruments measure all gases 10 times per second, thus ensuring real-time results.

    Our instruments detect heavy masses with high sensitivity and can be used for non-targeted contamination analysis, diagnostics of leaks and outgassing, or for the analysis of transient phenomena. The resulting ALD process improvments yield unmatched product quality.

  • With the IonTamer™ instruments, scientists have now robust, mobile, and high-performance instruments available, which identify trace amounts of species down to a few ppb concentration.

    Climate research focussing on ice, deep water, ambient air, polution or volcanoes is benefitting from our groundbreaking technology.

  • The IonTamer™ TOF-RGAs measure quantitatively, in situ, the composition of all gases in a coating chamber, and they deliver compositional results to process control systems up to 10 times per second. Therefore, it has the required speed and accuracy to allow for closed-loop control of vacuum coating processes.

    This allows to increase the reliability and throughput of existing processes or the development of new coating processes.

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