REAL-TIME AND IN-LINE COMPOSITION MONITORING
CVD, PVD, and Etching Process Control
STT-1800™ can measure the composition of gases used during semiconductor and display manufacturing, thanks to its high speed (a full high-resolution spectrum every 0.1 s) and sensitivity. Thanks to these properties and its small form factor, it can be used for process control to increase yield and reliability. Custom integrations with existing control systems are available.
Continuous Quality Control
STT-1800™ measures in real-time and in-line the composition of any gas. Thanks to its high sensitivity, it can quantify impurities at sub-ppm level, making it an ideal and versatile instrument for quality control. Moreover, the instrument’s dimensions make it easy to move and install it at the necessary point of use, thus making it a versatile tool for a variety of use cases in production, loading, unloading, and transfer facilities.
STT-1800™ provides a full determination of residual gases in vacuum chambers in just a few seconds. Based on the time-of-flight principle, it measures all residual gases 10 times per second without gain switching, thus ensuring quantitative results. The instrument can also be used for non-targeted analysis of phenomena in vacuum, diagnostic of leaks, material degradation, outgassing, and transient phenomena.
Coating Process Control
STT-1800™ measures quantitatively, in situ, the composition of all gases in the coating chamber at a rate of 10 kHz, and it delivers compositional results to PLC systems up to 10 times per second. Therefore, it has the required speed and accuracy to allow for closed-loop control of vacuum plasma coating processes. This allows to increase the reliability and throughput of existing processes, and to develop and deploy new coating processes.
Drinking water contaminations are detected after the water has already been consumed by the population.
We aim to control and monitor water quality directly at the source and this in real-time for a broad range of substances. Contaminations shall be identified before it is too late with remote online control and monitoring systems.
A space-qualified version of the STT-1800™ fitting in a 1U CubeSat is in the work to monitor in real-time the composition of the thermosphere and ionosphere influenced by diurnal variation of solar irradiance, solar rotation and cycle, magnetic storms, and climate change. These data may also allow to develop new models to relate variations of ionospheric concentrations with geological phenomena, such as earthquakes.