
Wafer Manufacturing
Process Control
The speed, resolution, and sensitivity of the IonTamer™ instruments enables process optimization for higher reliability and yield.
Our process gas analyzers are compact instruments monitoring the composition of gases in real time and in line, at high resolution, and with high sensitivity. We bring performance levels to industrial production line and civil infrastructures previously available only with benchtop laboratory instruments.
All IonTamer™ instruments are fully controlled and operated over the network. An intuitive desktop software simplifies the operators’ work to acquire and process valuable measurement data.
Process Control
The speed, resolution, and sensitivity of the IonTamer™ instruments enables process optimization for higher reliability and yield.
Contamination Control
Our instruments detect heavy masses with high sensitivity. The resulting ALD process improvements yield unmatched product quality.
Field Analysis
The IonTamer™ PS-H successfully identifies trace amounts of noble gases in air and is able to identify species down to a few ppb concentration.
Process Optimization
The IonTamer™ TOF-RGAs offer the required speed and accuracy for closed-loop control of vacuum coating processes.