The IonTamer™ instruments are time-of-flight residual gas analyzers (TOF-RGA) that monitor the composition of gases in real time, at high resolution, and with excellent sensitivity. As the world’s best performing RGAs, the IonTamer™ instruments bring performance levels to industrial and research vacuum facilities that were previously available only with benchtop laboratory instruments.
Applications include semiconductor, OLED display, optics, and solar panel manufacturing, vacuum coating processes (CVD, PVD, ALD), vacuum furnace and metallurgy, research in vacuum systems down to ultra-high vacuum, and in harsh environments.